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ULVAC
Vacuum Technology
Ulvac - kiko (Mini)
  Oil-sealed Rotary Vacuum Pumps (Medium vacuum)
1. Pumping speed 5~50L/min. Compact Type
Picture
Model
Pumping Speed
Ultimate Pressure
Featururs
50Hz
60Hz
Pa
torr
mbar
G-5DA
5
6
6.7
5X10-2
6.7X10-2
Compact design,
Hndy type
G-10DA
10
12
1.3
1X10-2
1X10-3
G-20DA
20
24
1.3X10-1
1X10-3
1X10-3
Picture
Model
Pumping Speed
Ultimate Pressure
Featururs
50Hz
60Hz
Pa
torr
mbar
GHD-030
30
36
6.7X10-2
5X10-4
6.7X10-4
Compact
High performannce
Low ultimate pressuer
G-50DA
50
60
1.3X10-1
1X10-3
1X10-3
GLD-051
50
60
6.7X10-2
5X10-4
6.7X10-4
GCD-051X
50
60
6.7X10-2
5X10-4
6.7X10-4
 Anti-corrosive version
2. Pumping speed 100~200 L/min. High performance
Picture
Model
Pumping Speed
Ultimate Pressure
Featururs
50Hz
60Hz
Pa
torr
mbar
G-100D
100
120
6.7X10-2
5X10-4
6.7X10-4
High performance,
Motor voltage fixed type
GMD-135
135
162
6.7X10-2
5X10-4
6.7X10-4
GLD-136A
135
162
6.7X10-2
5X10-4
6.7X10-4
Highperformance,
Universal motor/
Multi-voltages type,
GCD serise/
anti-corrosive version
GLD-136C
135
162
6.7X10-2
5X10-4
6.7X10-4
GLD-201A
200
240
6.7X10-2
5X10-4
6.7X10-4
GLD-201B
200
240
6.7X10-2
5X10-4
6.7X10-4
GCD-136X
135
162
6.7X10-2
5X10-4
6.7X10-4
GCD-201X
200
240
6.7X10-2
5X10-4
6.7X10-4
3. Pumping speed 50~200L/min. Anti-Corrosive / Chemical Type
Picture
Model
Pumping Speed
Ultimate Pressure
Featururs
50Hz
60Hz
Pa
torr
mbar
GCD-051X
50
60
6.7X10-2
5X10-4
6.7X10-4
Anti-corrosive
GCD-136X
135
162
6.7X10-2
5X10-4
6.7X10-4
 Anti-corrosive
Universal motor/
multi-voltages type
GCD-201X
200
240
6.7X10-2
5X10-4
6.7X10-4
GCD-136X
200
240
6.7X10-2
5X10-4
6.7X10-4
 Anti-corrosive
Universal motor/
multi-voltages type
GCD-201X
200
240
6.7X10-2
5X10-4
6.7X10-4
  Diaphragm Dry Vacuum Pumps (Rough vacuum)
1. Diaphragm Dry Vacuum Pumps
Picture
Model
Pumping Speed
Ultimate Pressure
Featururs
50Hz
60Hz
Pa
torr
mbar
Single stage type
Oil free Clean Pumping,
Compact design,
Low nois,
Easy to maintain
 
DAL-5S
5
6
24X103
180
240
DAL-10S
10
12
24X103
180
240
DA-40S
40
46
20X103
150
199
DA-60S
60
72
21X103
160
213
DAT-100S
100
100
13X103
100
133
DA-120S
120
144
13X103
100
133
DA-241S
240
260
16X103
120
160
DAL-361S
360
390
17X103
130
173
Two stage type
 
DAL-5D
5
6
6.7X103
50
66.5
DA-20D
20
24
5.3X103
40
53
DA-30D
20
36
6.7X103
50
67
DAT-50D
50
55
3.3X103
25
33
DA-60D
60
72
3.3X103
25
33.2
DA-121D
120
145
3.3X103
25
33
DAL-181D
180
210
3.3X103
25
33
2. Anti-Corrosive/Chemical Version Diaphragm Dry Pumps
Picture
Model
Pumping Speed
Ultimate Pressure
Featururs
50Hz
60Hz
Pa
torr
mbar
DTC-21
20
24
1.0X103
7.5
10
Anti-corrosive version,
All parts that see the gas are made in
PTFE, DTC-21,DTC-41
are attached protect cover
DTC-21K
20
24
1.0X103
7.5
10
DTC-41
40
46
1.0X103
7.5
10
DTC-41K
40
46
1.0X103
7.5
10
DTC-60
60
70
1.0X103
7.5
10
DTC-120
120
140
1.0X103
7.5
10
3. High Vacuum Type Diaphragm Dry Pumps
Picture
Model
Pumping Speed
Ultimate Pressure
Featururs
50Hz
60Hz
Pa
torr
mbar
 
DAU-100
100
110
266
2
2.66
High vacuum diaphragm dry pnmps
DAU-100H
100
110
1.0X103
7.5
10
  Scroll Type Dry Vacuum Pumps (Medium vacuum)
 Picture
Model
Pumping Speed
Ultimate Pressure
Featururs
50Hz
60Hz
Pa
torr
mbar
 
DVS-321
265
320
1.5
1.13X10-3
1.5X10-2
Oil-free,
Low ultimate pressure,
No oil maintenance,
DVS-631
525
630
1
7.5X10-3
1.0X10-2
DVT-300
6.7
5X10-2
6.7X10-2
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